Materials that can be corrosion-proofed
Processing time(min)
Temperature(℃)
The highest stripping capability among the products of JELK series
Cu, Ti, TiN, Ni, SiN, Th-Ox, and so on
1~30
25~70
Superior metal corrosion protection performance
Cu, Ti, TiN, Ni, SiN, Th-Ox, Al-Cu, Ag, W, and so on
Superior metal corrosion protection performance and does not fall under the Poisonous and Deleterious Substances Control Law
Superior balance between stripping performance and corrosion protection performance
Etching rate (nm/min. at 60℃)
Al-Cu
W
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