自动校验磁盘系统
自动校验磁盘系统
The Chemical Dispense System transfers chemicals to specified use points safely without contamination。
We tailor this system in accordance with chemical characters or customers chemical consumption amounts。
They are products of KANTO CHEMICAL ENGINEERING CO.，LTD。
Since1979Kanto Chemical Engineering Co.，Ltd.（KCE）newly created automatic Chemical Dispense System（CDS）for the semiconductor manufacturing process name d S-wagon，Kanto has been installing thousands of CDS。
Being a provider for both chemicals and systems，we always rise to the challenge of providing more advanced system to secure the chemical quality in a safe environment。
产品，产品
| 产品，产品 |
强制控制 |
联接器，联接器 |
| S～wagon |
Max.1500L/M |
15L压力控制器，
18升压力控制器 |
| LS-100，LS-200 |
1500 to 10000L/M |
100L压力控制器，
200L non-pressure container
etc。 |
| Fixed-type |
Min.2000L/M |
1M3container，
tank truck
etc。 |
| SCS series |
Max.500L/M |
5-20 L non-pressure container |
Dilution/Blending System
Our Automatic Chemical Dilution and Blending System can adjust concentration of chemicals to the values required by customers very accurately。It is applicable to wide range of chemicals such as developer，hydrofluoric acid，ammonia water，etchant and mix-acid，etc。
Features
- Measuring of chemicals and DI water is accomplished by load cell or flow meter accurately and they are mixed in blend tank or inline mixer。
- After mixing，concentration is checked。In case of concentration failure，concentrates or DI water is added for the compensation。
- Dilution and Blending System supplies optimized chemical to the use point through storage tanks，etc。
