Automatic Chemical Dispense System

Automatic Chemical Dispense System

The Chemical Dispense System transfers chemicals to specified use points safely without contamination.
We tailor this system in accordance with chemical characters or customers chemical consumption amounts.

They are products of KANTO CHEMICAL ENGINEERING CO.,LTD.

Since 1979 Kanto Chemical Engineering Co., Ltd.(KCE) newly created automatic Chemical Dispense System (CDS) for the semiconductor manufacturing process named S-wagon, Kanto has been installing thousands of CDS.
Being a provider for both chemicals and systems, we always rise to the challenge of providing more advanced system to secure the chemical quality in a safe environment.

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Products


Product Forecasted consumption Container
S~wagon Max. 1,500L/M 15L pressure container,
18L pressure container
LS-100,LS-200 1,500 to 10,000L/M 100L pressure container,
200L non-pressure container
etc.
Fixed-type Min. 2,000L/M 1M3container,
tank truck
etc.
SCS series Max. 500L/M 5~20L non-pressure container



Dilution / Blending System

Our Automatic Chemical Dilution and Blending System can adjust concentration of chemicals to the values required by customers very accurately. It is applicable to wide range of chemicals such as developer, hydrofluoric acid, ammonia water, etchant and mix-acid, etc.

Features

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  • Measuring of chemicals and DI water is accomplished by load cell or flow meter accurately and they are mixed in blend tank or inline mixer.
  • After mixing, concentration is checked. In case of concentration failure, concentrates or DI water is added for the compensation.
  • Dilution and Blending System supplies optimized chemical to the use point through storage tanks, etc.



Contact Us

E-mail Inquiry Form

Inquiry Form

Telephone

+81-3-6214-1081