DeerClean-LK series

  • The post-etch residue removers that enable to remove residues after dry etching and ashing at low temperature，without causing chemical damages to Cu and a variety of low-k films。

产品线

产品名称 删除对象 处理表，处理表
DeerClean-LK1 Cu系残渣 平衡和单壁
DeerClean-LK2series Cu系残渣、Si系残渣、
DeerClean-LK3series Cu系残渣、Si系残渣、
有机残渣
DeerClean-LK4 Cu系残渣
有机残渣



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