Optical technology for micro machiningkey state laboratoriesSupported byInstitute of Optoelectronics Technology, Chinese Academy of Sciences。The laboratory was established in 1991 with the approval of the State Planning Commission.In December 1993, it was approved by the National Planning Commission and national academies of sciences to open to the outside world, and passed the national acceptance in 1996.
Chinese name
State Key Laboratory of Optical Technology for Micromachining
Establishment time
1991
organizational management
Institute of Optoelectronic Technology, China Academy of Family Sciences
Optical technology for micro machiningkey state laboratoriesSupported byInstitute of Optoelectronic Technology, China Academy of Family Sciences。The laboratory was established in 1991 with the approval of the State Planning Commission.In December 1993, it was approved by the National Planning Commission and national academies of sciences to open to the outside world, and passed the national acceptance in 1996.The director of the laboratory is researcher Luo Xiangang, and the director of this academic committee is academician Zhou Bingkun.
research field
Announce
edit
The laboratory aims to promote the substantive progress of key scientific and technical issues in micro processing optical technology, aims to serve the major strategic needs of the country with basic research, aims at the international forefront of micro nano optics, focuses on the interaction between electromagnetic waves and micro nano structures, and conducts in-depth research on new phenomena and mechanisms of electromagnetic waves in micro nano structures and the generation methods of micro structures,To form a base for basic and applied basic innovation research, talent training and popular science education in new concept materials, micro/nano optoelectronic devices and systems.
The laboratory mainly carries out research in four directions: micro/nano optics and sub wavelength optics, micro optics and micro systems, micro/nano processing technology and equipment, high-resolution imaging and spectroscopy technology.The research contents include: subwavelength artificial structural materials, super diffractive optics, optometry wavefront engineering, micro nano optics, micro machining technology and equipment, MEMS technology, 193nm lithography, lightweight high-resolution imaging, etc.
Exchange and cooperation
Announce
edit
State Key Laboratory of Optical Technology for MicromachiningIt has a good cooperative relationship with more than dozens of domestic and foreign scientific research institutes, colleges and universities in this field.University of Manchester, University of Berkeley, National University of Singapore, Rutherford, UKkey state laboratoriesSwitzerlandZurichCSEM laboratory, American SUPERRRAY company, Sichuan University, Microelectronics Center of Chinese Academy of Sciences, Shanghai Institute of Technology and Physics, etcMicro optics, microelectronics optics and its applications have carried out fruitful cooperation and exchanges.
Project achievements
Announce
edit
Our scientific research funds are increasing year by year, and we have achieved a number of high-level research achievements:Micro opticsThe technology research platform, based on the moving mask exposure method proposed by the laboratory, solved the high fidelity transmission of various micro relief structures in the photolithography process by optimizing the design and developing new processes, and produced largenumerical aperture Wide band from infrared to ultraviolet, deep relief, aspherical, highFill factorThe micro array elements based on FPGA can realize the integration of small systems.Developed successfully for Hartmann wavefront sensor, infraredfocal planeThe light concentrator in the detector andsemiconductor laser The wavefront shaping array elements of the 863 have made contributions to the national high-tech development.
diffractionMicrolensThe practical research of array has reached the domestic leading and international advanced level.Facing the needs of the development of aerospace industry, the research results of hybrid refractive diffractive optical system were applied to aerospace optical systems for the first time in China.The refractive diffractive hybrid imaging optical system hasfieldLarge, light weight, no distortion and strong temperature adaptability;For space imaging refractive diffractive hybrid optical systemTransmissivityIt is 2.2 times of the traditional optical system, and the operating distance is doubled.The star sensor developed in the laboratory can improve the satellite attitude and orbit control accuracy by nearly oneOrder of magnitudeThese research results have broad application prospects in military, aerospace and civil fields.
The key unit technology of microelectronic lithography has been studied unremittingly.Breakthroughnumerical aperture Photolithographyobjective lenseThe design and development of G line and I line large numerical aperture projection lithography objective lens, uniform lighting system, high-precision coaxial alignment and worktable positioning and other difficult unit technologies have made China one of the few countries in the world that can develop and produce G line and I line large numerical aperture projection lithography objective lens. This achievement has won the first prize for scientific and technological progress of the Chinese Academy of Sciences, and successfully developed the first 0.8 μ m projection lens in ChinaPhotolithography machine, won the third prize of National Science and Technology Progress AwardNational MicroelectronicsThe development of equipment provides a technical basis.The laboratory also carried out in-depth and systematic research on wavefront engineering, using excimer lithography system and phase-shifting mask technology to improve the resolution from 0.5 μ m to 0.3 μ m;The atomic forcePhotolithographyProspective research has made good progress.
Since 1997, it has won one third prize of the National Science and Technology Progress Award, one first prize and one third prize of the Chinese Academy of Sciences Science and Technology Progress Award, one third prize of the Chinese Academy of Sciences Natural Science Award, and one third prize of Sichuan Science and Technology Progress Award.20 invention patents were accepted and 24 utility model patents were authorized.He has published more than 260 academic papers in core scientific journals and conferences at home and abroad.
After a new round of national assessment in 2012, the laboratory has successively formulated a series of strategic plans in terms of talent introduction, high-level scientific research achievements and management mechanismMicro optics, refractive diffractive hybrid optics and microelectronic optical technology, facing the international high-tech frontier in the information field, strive to build the laboratory into an international first-class research base for micro optics and microelectronic optical technology innovation and a base for cultivating high-level R&D talents.
