REC-01

REC-01is strongly acidic etchant for Ru thin film。
Capable of removing ruthenium oxide。
Heating shortens the liquid life，so it is recommended to use at low temperature as much as possible。

产品，产品	温度	出口，出口（30℃，nm/min.）	Treatment Method
REC-01	20～40	100	诊断，诊断

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