Structures developed to reduce the number of true cavities in semiconductor applications
Vacuum cavity is a structure developed to reduce the number of true cavities in semiconductor applications, and its wafer capacity is almost unchanged.
- Chinese name
- Vacuum Chamber
- Features
- Static, dynamic
- Purpose
- Reduces the number of true cavities in semiconductor applications
- Technology
- Preset air bearing with differential pressure vacuum groove
This structure uses a preset with a differential pressure vacuum groove Air bearing Moving vacuum. The product features improved static and dynamic response of machine positioning, shortened pumping time and stabilization time, etc. New Way Air Bearings Inc. … 
