KSMF series
- KSMF series is a mixed acid type etchant (strongly acidic) and can etch Mo/Al or Ti/Al stacked film at once.
- Less side etching and good taper shape.
- KSMF-200 series include fluoride.
Product Line
| Products |
Etching target |
Tempereture（℃） |
Treatment method |
| KSMF-100 |
Mo/Al stacked film
Mo/Al/Mo stacked film |
30～50 |
Dipping and spray |
| KSMF-150 |
| KSMF-260 |
Ti/Al stacked film
Ti/Al/Ti stacked film |
Etching condition：stirring (weak), 30℃
