KPZ series
- KPZ series is a PZT (lead zirconate titanate) thin film etchant.
- It is a mixed acid type etchant and can etch PZT at high speed.
- The cross-sectional shape after etching is almost vertical.
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Cross-section SEM image after etching with KPZ-02 (35℃, strong strring, 66sec.) |
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Product Line
Products |
Temperature(℃) |
Etching rate (35℃, Strong stirring, μm/min.) |
Cross-sectional shape |
Etching Method |
KPZ-02 |
30~40 |
1~3 |
Vertical |
Spray |
KPZ-03 |
30~40 |
1~3 |
Vertical |
Spray |
KPZ-04 |
20~35 |
10~20(5 ※) |
Arout 80° |
Dipping and spray |
The etching rate and cross-sectional shape vary depending on the PZT film quality.
※No stirring