AURUM series
- AURUM series is an iodine-based Au etchant.
- AURUM-300 series can be used an Au selective etching solution that hardly dissolves Ni and Al.
- AURUM-304, 305, 306 can also be used as Pd etchant.
Product Line
Products |
Etching rate (nm/min.) |
Fine processing |
Features |
AURUM-101 |
550 |
-什么 |
For general application, tank cleaning etc. |
AURUM-201 |
100 |
△ |
For fine pattern |
AURUM-302 |
100 |
◎ |
For extremely fine pattern, Long bath life |
AURUM-304 |
300 |
◎ |
For extremely fine pattern, Long bath life Capable of using as Pd etching |
AURUM-306 |
80※ |
◎ |
For extremely fine pattern, Long bath life Capable of using as Pd etching |
AURUM-308 |
650※ |
○ |
For extremely fine pattern, Long bath life High etching rate |
AURUM-314 |
350 |
○ |
For extremely fine pattern, Long bath life |
AURUM-401 |
100 |
△ |
For general application, Alkali metal free |
Etching condition:stirring (weak), 30℃ ※25℃