SMF series

  • KSMF series is a mixed acid type etchant（strongly acidic）and can etch Mo/Al or Ti/Al stacked film at once。
  • Less side etching and good taper shape。
  • KSMF-200series include fluoride。

KSMF系列（英）.jpg


产品线

产品，产品 调节装置 温度 Treatment method
KSMF-100 Mo/Al stacked film
Mo/Al/Mo stacked film		 30-50 分度和分度
KSMF-150
KSMF-260 Ti/Al stacked film
Ti/Al/Ti stacked film

Etching condition:stirring（weak），30℃




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