KSMF series

  • KSMF series is a mixed acid type etchant (strongly acidic) and can etch Mo/Al or Ti/Al stacked film at once.
  • Less side etching and good taper shape.
  • KSMF-200 series include fluoride.

KSMF串行(英).jpg


Product Line

Products Etching target Tempereture(℃) Treatment method
KSMF-100 Mo/Al stacked film
Mo/Al/Mo stacked film
30~50 Dipping and spray
KSMF-150
KSMF-260 Ti/Al stacked film
Ti/Al/Ti stacked film

Etching condition:stirring (weak), 30℃




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