- KSMF series is a mixed acid type etchant (strongly acidic) and can etch Mo/Al or Ti/Al stacked film at once.
- Less side etching and good taper shape.
- KSMF-200 series include fluoride.
||Mo/Al stacked film
Mo/Al/Mo stacked film
||Dipping and spray
||Ti/Al stacked film
Ti/Al/Ti stacked film
Etching condition：stirring (weak), 30℃