自动校验磁盘系统
- 详细信息
Since1979when Kanto Chemical newly created automatic Chemical Dispense System（CDS）for the semiconductor manufacturing process named S-wagon，Kanto has been vended CDS more than1600 until today。Being a provider for both chemicals and systems，we always rise to the challenge of providing more advanced hardware to secure the chemical quality in a safe environment。
*They are products of KANTO CHEMICAL ENGENEERING CO.，INC。
We have prepared the PDF files of the catalogue of products。
If you want detailed information，please download those。
自动校验磁盘系统
The Chemical Dispense System transfers chemicals to specified use points safely without contamination。We tailor this system in accordance with chemical characters or their consumption amounts for customers。
| 产品，产品 |
强制控制台 |
联接器，联接器 |
| S-wagon |
Max.1500L/M |
15L压力控制器，
18升压力容器 |
| LS-100，LS-200 |
1500 to 10000L/M |
100L压力控制器，
200L non-pressure container
etc。 |
| Fixed-type |
Min.2000L/M |
1M3container，tank truck，
etc |
Dilution/Blending System
Our Automatic Chemical Dilution and Blending System can adjust concentration of chemicals to the values required by customers very accurately。It is applicable to wide range of chemicals such as developer，hydrofluoric acid，ammonia water，etchant and mix-acid，etc。
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Features
Measuring of chemicals and DI water is accomplished by load cell or flow meter accurately and they are mixed in blend tank or inline mixer。
After mixing，concentration is checked。In case of concentration failure，concentrates or DI water is added for the compensation。
Dilution and Blending System supplies optimized chemical to the use point through storage tanks，etc。
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