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XEN-393 calorimeter sensor chip

Date: September 26, 2024 19:56

Abstract: XEN-393 is a series of micro machined thin-film calorimeter sensor chips provided by the Netherlands Xenor Integration, which is designed for small sample measurement at high temperature scanning rate. XEN-393 series uses aluminum electrode interconnection, which limits their temperature range to be lower than XEN-394 series, which uses gold electrode interconnection. The calorimeter sensor adopts single-sided ultra-thin silicon nitride film, which has the characteristics of high thermal resistance to the environment and small time constant. This makes these sensors particularly suitable for measurement and rapid measurement in gas medium environment, such as rapid scanning calorimetry.

Netherlands Xenor Integration XEN-393 Calorimeter Sensor

-Fast scanning calorimeter sensor chip

Netherlands Xensor Integration company provide XEN-393 is a series of micro machined thin film calorimeter sensor chips designed for small sample measurement at high temperature scanning rate. XEN-393 series uses aluminum electrode interconnection, which limits their temperature range to be lower than XEN-394 series, which uses gold electrode interconnection. The calorimeter sensor adopts single-sided ultra-thin silicon nitride film, which has the characteristics of high thermal resistance to the environment and small time constant. This makes these sensors particularly suitable for measurement and rapid measurement in gas medium environment, such as rapid scanning calorimetry.

Features of XEN-393 calorimeter sensor of the Netherlands Xenor Integration

Heating and cooling rates up to 1 MK/s
The sample temperature range is wide, from - 273 ° C to+500 ° C

Operating principle of XEN-393 calorimeter sensor characteristics of the Netherlands Xenor Integration

The calorimeter chip consists of a thin film suspended in a thick silicon based frame. The central area distribution of the heating film of the integrated heater: the sample area of the sensor chip, and the temperature of the sample area measured by the thermopile. In this way, the tested sample can undergo a predetermined temperature distribution so as to observe the behavior of the sample with temperature change.

Xenor Integration XEN-393 Calorimeter Sensor Comparison of technical parameters

XEN-39390: This is a small sample area calorimeter chip, with a sample area of about 30x30 μ m, and 6 pairs of thermopiles in two 4-wire heaters (bias and protection heaters).
XEN-39391 and XEN-39395： This is a medium-sized sample area calorimeter chip, with hot spot areas of about 60x60 μ m and 60x70 μ m, and six pairs of thermopiles in two 4-wire heaters.
XEN-39392 and XEN-39399 ： These are larger sample area calorimeter chips with a sample area of about 100x100 μ m and six pairs of thermopiles in two 4-wire heaters. XEN-39399 has a sample area covered by polysilicon to improve temperature uniformity.
XEN-39397 and XEN-39398 ： These are Max size sample area calorimeter chips. XEN-39398 has a double 4-wire heater, the sample area is about 250x250 μ m, and there are six pairs of thermopiles in two 4-wire heaters. The sample area is covered with polysilicon to improve the temperature uniformity. XEN-39397 has a single 4-wire heater and a 20 pair thermopile, the sample area is 1000x1000 μ m, and aluminum is covered to improve the temperature uniformity.

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