Sensor of Xenor Integration calorimeter

Sensor of Xenor Integration calorimeter

Xenor Integration XEN-393 is a series of micro machined films Calorimeter sensor , designed for small sample measurement at high temperature scanning rate. XEN-393 series adopts aluminum interconnection, which limits their temperature range to be lower than XEN-394 series, which adopts gold wire interconnection. XEN-393 calorimeter sensor adopts single-sided ultra-thin silicon nitride film, which has the characteristics of high thermal resistance to the environment and small time constant. This makes these sensors particularly suitable for measurement and rapid measurement in gas environment, such as rapid scanning calorimetry.

XEN-393 Calorimeter Sensor Features
• Heating and cooling rates up to 1 MK/s
• Wide sample temperature range, from - 273 ° C to 500 ° C
Typical application of XEN-393 calorimeter sensor: research on thermally induced physical transformation and chemical processes of polymers, drugs and explosive materials, such as crystallization and recombination.

XEN-393 Calorimeter Sensor Operation principle

Calorimeter sensor It consists of a thin film suspended in a thick silicon frame. The middle of the heating film of the integrated heater: the sample area of the chip, and the temperature of the sample area is measured by the thermopile. In this way, the sample can undergo a predetermined temperature distribution in order to observe the behavior of the sample as it changes with temperature.

XEN-393 Calorimeter Sensor Design considerations and differences
XEN-39390: This is a small sample area calorimeter chip, with a sample area of about 30x30 μ m, and 6 pairs of thermopiles in two 4-wire heaters (bias and protection heaters).
XEN-39391 and XEN-39395: This is a medium-sized sample area calorimeter chip, with hot spot areas of about 60x60 μ m and 60x70 μ m, and six pairs of thermopiles in two 4-wire heaters.
XEN-39392 and XEN-39399: These are larger sample area calorimeter chips with a sample area of about 100x100 μ m and six pairs of thermopiles in two 4-wire heaters. XEN-39399 has a sample area covered by polysilicon to improve temperature uniformity.
XEN-39397 and XEN-39398: These are very large sample area calorimeter chips. XEN-39398 has a double 4-wire heater, the sample area is about 250x250 μ m, and there are six pairs of thermopiles in two 4-wire heaters. The sample area is covered with polysilicon to improve the temperature uniformity. XEN-39397 has a single 4-wire heater and a 20 pair thermopile, the sample area is 1000x1000 μ m, and aluminum is covered to improve the temperature uniformity.