Powder alloy sputtering metal target
The advantage of hot isostatic pressing powder metallurgy process is to solve the problem of melting casting The fabrication of refractory metal sputtering target materials that cannot be realized by the method.
Powder metallurgy technology also has the advantages of easy to obtain uniform fine crystal structure, saving raw materials, high production efficiency, and has become the main preparation method of sputtering targets.
The Key to the Preparation of Target Materials by Saa Powder Alloy Company, Germany key lie in:
1. Select high-purity and ultra-fine powder as raw materials;
2. The hot isostatic pressing method is adopted to realize the rapid densification of the material, ensure the low porosity of the target and the tiny grains;
3. High alloy content, isotropic and isotropic materials, uniform structure;
4. It can realize the combination between targets of different materials, greatly expanding the application range of targets;
5. The introduction of impurity elements is strictly controlled in the preparation process.
Keywords: German sputtering metal target; Hot isostatic pressure sputtering target; Refractory metal sputtering target; Very high purity sputtering metal target; Powder metallurgy sputtering metal target; High purity Cr target; High purity Mo target; High purity Ni target; High purity W target
