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Your location: home page > Company Dynamics > GYI Quantum Technology (Hefei) Co., Ltd > The instrument of the Physical and Chemical Science Experiment Center of the University of Science and Technology of China is new, and the test run of the Guoyi ultrahigh resolution field emission electron microscope

The instrument of the Physical and Chemical Science Experiment Center of the University of Science and Technology of China is new, and the test run of the Guoyi ultrahigh resolution field emission electron microscope

2024/5/16 17:22:16 Provider: GYI Quantum Technology (Hefei) Co., Ltd Enter the booth of the company
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The instrument of the Physical and Chemical Science Experiment Center of the University of Science and Technology of China is new, and the test run of the Guoyi ultrahigh resolution field emission electron microscope
 

Recently, the Physical and Chemical Science Experiment Center of University of Science and Technology of China has newly installed the ultra-high resolution field emission scanning electron microscope SEM5000X independently developed by Guoyi Quantum. The equipment has been commissioned and will be put into trial operation.




Two types of Guoyi Quantum Scanning Electron Microscope in the Physical and Chemical Science Experiment Center of University of Science and Technology of China
 

Physical and Chemical Science Experiment Center of University of Science and Technology of China
The Physical and Chemical Science Experiment Center of University of Science and Technology of China is one of the public technology innovation platform experiment centers of University of Science and Technology of China, which has been under preparation since 1979. The center follows the construction principle of "centralized investment, unified management, openness and public use, and resource sharing", and aims to establish high-quality resources and sharing mechanisms with good conditions, complete functions, standardized management, and advanced and efficient, so as to provide technical support for cultivating innovative talents and carrying out high-level scientific research, and provide technical support for social and economic construction. As an early built large-scale instrument open platform of the university, the center not only undertakes the technical support analysis and testing tasks of relevant departments, national research centers, national key laboratories, provincial laboratories, national, provincial and ministerial scientific research projects, but also provides teaching, scientific research and experimental conditions and environment for relevant disciplines.
 
 

Ultra high resolution field emission scanning electron microscope SEM5000X
The SEM5000X is an ultra-high resolution field emission scanning electron microscope with a breakthrough resolution of 0.6 nm@15 KV and 1.0 nm@1 KV. High resolution objective lens design, high voltage tunnel technology (SuperTunnel) and mirror tube process upgrade have further improved the low voltage resolution. The newly designed sample bin has 16 expansion interfaces. The rapid sample changing bin supports 8-inch wafers (208 mm in diameter), greatly expanding the application range. High scan mode and enhanced automatic function bring stronger performance and better experience.
 
 
Product advantages
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Ultra high resolution imaging, reaching a breakthrough 0.6 nm@15 KV and 1.0 nm@1 kV
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Double deceleration technology combined with sample table deceleration and high-pressure tunnel technology challenges the sample shooting scene
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High precision mechanical center sample table, super stable frame shock absorption design, can be matched with the overall housing design, greatly reducing the impact of the environment on the limited resolution
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Fast sample changing bin with large support for 8-inch wafer (large diameter 208 mm) to meet the needs of semiconductor and scientific research applications
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Application case
 
 
 
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