@第{zbMATH06809403条，作者={Estellers，Virginia and Thiran，Jean-Philippe and Gabrani，Maria}，标题={光学光刻中显微图像的表面重建}，FJournal={IEEE图像处理事务}，日志={IEEE Trans.Image Process.}，ISSN={1057-7149}，体积={23}，数字={8}，页码={3560--3573}，年份={2014}，语言={英语}，DOI={10.1109/TIP.2014.2330791}，关键词={94A08}，zbMATH={6809403}，Zbl={1374.94097}}